Thermal Mass Flow Meters and Controllers
A single-instrument solution for measuring and controlling flow in laboratory and clean processing environments. They handle flow rates from 0.014 mln/min to 11,000 m³n/hr and can operate under pressures from vacuum to 400 bar.
Key Specifications
- Flow range: 0.014 to 0.7 mln/min and 220 to 11,000m³n/hr
- Accuracy: 0.5% Rd plus 0.1% FS
- Rangeability in digital mode up to 1:150
- Pressure ratings: 10/16/25/40/100/200/400 bar
- Highly resistant to mechanical shocks and pressure fluctuations
- Large range of input/output options
- Extremely fast and dynamic response
- User configurable control characteristics
Key Applications
- Analytical and environmental equipment
- Gas flow monitoring in food, chemical and petrochemical industries
- Gas consumption measurement in gas distribution systems
- Detection of gas leakage through objects
- Semiconductor manufacturing
- Surface treatment installations
