For substrates with a highly structured wafer topography, deep MEMS structures or a non-planar surface texture, the iSPRAY-300 by SAWATEC ensures that the coating is as homogeneous as possible. It is a high-precision spray coater for manual spray coating or spray development processes and it is used specifically in research and development laboratories, for pilot productions and small production units in MEMS fabrication.
- Up to 50 programmes with 24 segments each can be programmed.
- Ouick start function for repeat processes.
- User-friendly process configuration with touch screen panel.
- Process parameters: spray pattern, spray arm speed, spray time, spray beam cone.
- Electrically operated spray arm with selectable speed in the direction of the x-axis and the y-axis.
- Adjustable spray nozzle with constant nozzle pressure and automatic cleaning function.
- Control elements for dispensing compressed air and vacuum.