SPIN MODULE
The manual spin modules by SAWATEC are used for substrates with no or very low surface structures. All commercial photo-resists can be coated homogeneously on wafers up to 300 mm or 9x9 inch substrates. SAWATEC spin modules are preferentially used for laboratories, R&D, pilot projects and institutes.
FEATURES
- High uniformity and repeatability.
- User-friendly operation.
- Flexibility in terms of substrates used.
- Swiss Manufacture Standards.
