SAWATEC supplies various hotplates for typical soft bake and hard bake processes in lithography, MEMS and similar applications. Outstanding features of the manual hotplates are their robust design and ease of operation. The extensive HP series can be used for wafers up to 300mm or 12x12 inch substrates.
Temperature control with digital target and actual value display.
Automatic temperature limit switch, no overheating.
Hotplate with safety glass, easy cleaning.
Easy leveling of the hotplate, prevents discharge of photo-resist.
Manual substrate fixation via vacuum.
Manual loading and unloading of the substrates.